ADMA 362 - Nano Fabrication

(3 semester hours)
Prerequisites: Permission of the instructor
Description: This course is an overview of the broad spectrum of processing approaches involved in “top down”, “bottom up”, and hybrid nanofabrication. The majority of the course details a step-by-step description of the equipment, facilities processes and process flow used in today’s device and structure fabrication. The student will be introduced to processing and manufacturing concerns such as safety, process control, contamination, yield, and processing interaction. The student will design process flows for micro- and nano-scale systems. The student will learn the similarities and differences in “top down” and “bottom up” equipment and process flows by undertaking hands-on processing. This hands-on overview exposure covers basic nanofabrication processes including deposition, etching, and pattern transfer. Offered as needed.